Surface Cooper SRP-4 Probe for Hitachi CMI700

SRP-4 probe is a spare parts of CMI700(CMI760),CMI563 instrument, Cmi700 Probe used to test the surface Cu thickness. 

Surface Cooper Srp-4 Probe data:

Chemical cooper：10 μin – 500 μin (0.25 μm – 12.7 μm)

electroplating cooper：0.1 mil – 6 mil (2.5 μm – 152 μm)

lind with range：8 mil – 250 mil (203 μm – 6350 μm)

accuracy：±1% (±0.1 μm) according to standard plate

Accuracy of Hitachi Srp-4 Probe:

chemical cooper：standard deviation 0.2 %；

electroplating cooper：standard deviation 0.5 %

resolution：0.01 mils ≥ 1 mil, 0.001 mils <1 mil,

0.1 μm ≥ 10 μm, 0.01 μm < 10 μm, 0.001 μm < 1 μm

About CMI700 surface/hole copper thickness tester:

The CMI 760 can be used to measure surface copper and copper thickness in perforations. This highly scalable benchtop thickness gauge system uses both microresistance and eddy current methods to achieve accurate and precise measurements of copper thickness on the surface and inside the hole. The CMI 700 benchtop measurement system is extremely versatile and scalable, and its compatibility with a variety of probes enables it to meet the needs of a variety of applications, including the measurement of surface copper, copper in perforations and copper in microholes thickness, as well as copper in holes quality testing.
At the same time, the CMI 760 has advanced statistical functions for the analysis of test data.